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Software for Simulation, Planning, and Control of Physical Vapor Deposition Processes

Disclosure Number:

107

Category:

Computer Software

Office of the Senior Vice President for Research
304 Old Main
University Park, Pennsylvania 16802
OSVPR Phone: 814-863-9580
Email: osvpr@psu.edu

IRB Office Phone: 814-865-1775

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Pennsylvania Technical Assistance Program

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